Cleveland, Ohio, July 2004 - Keithley Instruments, Inc.
(NYSE:KEI), a leader in solutions for emerging measurement needs, has developed
a packaged, ready-to-run parametric test system with unrivaled cost-per-pin and
total price/performance ratio. The Model S470 Parametric Test System is
optimized for production testing of 200mm wafers at the 130nm CMOS node and
beyond.
High Throughput, Accuracy, and Flexibility
The Model
S470 quickly and accurately takes a wide range of I-V and C-V measurements on
CMOS, bipolar, and GaAs ICs, including automotive and telecom ICs, LCDs, and
more. The system's exceptional ease of use increases its overall test value by
speeding and simplifying both test programming and day-to-day operation.
Proven Design
The Model S470 design is based on
Keithley's production-proven and highly reliable UNIX-based Model S400 Series
testers (of which hundreds are installed around the world), backed by a
worldwide support and spares infrastructure. The application software is the
latest version of the Keithley Test Environment (KTE v5.1), with a test
executive and operator interface common to other Model S400 Series and the
popular Model S600 Series testers. This simplifies migration of test programs
and is supported by regular system upgrades for maximum hardware and software
reuse. The Model S470 comes with a one-year warranty and is available with
options such as RF testing at up to 40GHz, adaptive test software that automates
first-level process diagnostics, and SECS/GEM for 200mm factory automation.
Application Benefits
The Keithley Model S400 Series
Parametric testers have been widely used by the semiconductor industry since the
1980s, supported by Keithley's continual system upgrades to keep pace with
changing technologies and customer test requirements to deliver industry-leading
capital equipment reuse. With better than 10fA current measurement resolution,
the Model S470 Tester is an economical choice for testing the most common types
of ICs now in high volume production. It satisfies the need for accurate and
repeatable measurements free of artifacts, while maintaining high test
throughput. The KTE v5.1 software is the industry's easiest to use parametric
test application, combining powerful yet uncomplicated tools for test code
development and modification, a wide range of measurement capabilities, and
advanced data analysis - forming a complete parametric test solution.
Product Details
The Model S470 bundled system comes
in a 24-pin configuration, including probe card adapter and cabling, with full
guarding and Kelvin connections to the probe needles. The base system includes
four DC I-V source-measure units, 100kHz capacitance/conductance meter,
picoammeter, and system reference unit with calibration and diagnostics
software. The picoammeter is routable to all pins and provides a measurement
resolution of less than 10fA. The high-speed/low-current air matrix switching
cards are similar to the popular Keithley 707A/7174A cards and provide fast
settling times. The result is measurements with high integrity at production
throughputs.
A Powerful Combination with Model 2182A Nanovoltmeter for
Resistance Measurements
Device testing and characterization for today's
very small and power-efficient electronics requires sourcing low current levels
with great precision. Lower stimulus currents produce lower-and harder to
measure-voltages across the device. Combining the Model 6220 or Model 6221 with
a Keithley Model 2182A Nanovoltmeter makes it possible to address both of these
challenges.
System options include:
- Up to 4 additional DC I-V source-measure units
- Expansion to 36 or 48 pins
- RF option for 40GHz non-extrapolated s-parameter measurements
- High speed 1MHz or multifrequency capacitance meter for advanced dielectrics
- Medium current pulsed voltage source for flash and charge pumping
applications and for measuring up to 2A of current
- Microvoltmeter for monitoring copper processes
- Pulse generator (up to two, each with single or dual channel)
- Frequency counter or spectrum analyzer for ring oscillator measurements
- Keithley Recipe Manager for automated version control and recipe fanout with
ISO-9000 traceability for recipes
- Adaptive test for automated first-level process diagnostics
Availability
Orders are being accepted immediately
for delivery 90 days ARO. Consult the factory for system pricing based on
installed options or for availability of upgrades from earlier S400 Series
systems. For more information on the Model S470 Parametric Test System, or any
of Keithley's semiconductor test solutions, contact the company at: www.keithley.com
About Keithley Instruments
With more than 50 years of measurement expertise, Keithley
Instruments has become a world leader in advanced electrical test instruments
and systems from DC to RF (radio frequency) geared to the specialized needs of
electronics manufacturers for high performance production testing, process
monitoring, product development, and research. By building upon our strength in
electrical measurement solutions for research, Keithley has become a production
test technology leader for the semiconductor, wireless, optoelectronics, and
other precision electronics segments of the worldwide electronics industry. The
value we provide to our customers is a combination of precision measurement
technology and a rich understanding of their applications, which enables them to
improve the quality, throughput, and yield of their products.
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