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Semiconductor Parametric Test Systems
Keithley’s S530 Semiconductor Parametric Test Systems are engineered to handle all the DC and C-V measurements required in process control monitoring, process reliability monitoring, and device characterization, and are designed for use in production and lab environments that entail a broad range of devices and technologies.
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S530 Basic
Series S530 Parametric Test Systems
  • Industry’s most cost-effective fully automatic parametric tester
  • Compatible with popular fully automatic probers
  • Cabled-out configuration maximizes prober interface flexibility
  • Supports 5-inch probe card libraries
  • Proven instrumentation technology ensures high measurement accuracy and repeatability
S530 Low Current
Series S530 Parametric Test Systems
  • pA current measurement capability
  • Low leakage measurement integrity
  • 20W SMUs provide up to 1A or 200V
  • Configurable up to 8 SMUs and 60 pins
  • Optional adapter extends guarding to probe
  • Compatible with popular fully automatic probers
  • C-V measurements up to 1MHz
S530 High Voltage
Series S530 Parametric Test Systems
  • Source up to 1000V at 10mA
  • High voltage leakage and breakdown testing
  • Low leakage measurement integrity
  • pA current measurement capability
  • 20W SMUs provide up to 1A or 200V
  • Configurable up to 7 SMUs and 32 pins
  • Optional adapter extends guarding to probe
  • Compatible with popular fully automatic probers
  • C-V measurements up to 1MHz
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CALL NUMBER
1-800-935-5595 (US Only)